JSR Post CMP Cleaning Solution

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JSR Post CMP Clean solution is designed for the highest particle removal efficiency after CMP polishing on various layers. Polymer type of metal inhibitor enhances the efficiency of cleaning performance on barrier metals.

Technology Trends and JSR Cleaning Solutions

JSR Post CMP Cleans

Typical Properties and Performance

JSR Post CMP Cleans

JSR Post CMP Cleans

JSR Cleaning &CMP Concept

JSR's Cleaning & CMP research concept starts from fundamental to cleaner and finally to slurry