Notice Regarding Additional Investment in Inpria Corporation

Corporate
Corporate

TOKYO, Japan – February 20, 2020 - JSR Corporation (Representative Director, CEO: Eric Johnson, hereinafter referred to as ”JSR”)announced today that it has invested in Inpria Corporation by joining the company’s Series C funding round designed to promote its initiatives for commercializing EUV (Extreme Ultraviolet) photoresists.

With a focus on providing practical EUV materials solutions, JSR and Inpria intend to collaborate on addressing the global semiconductor industry's most critical and advanced patterning process requirements.

From the company’s inception, Inpria has been engaged in non-chemically amplified photoresist development. Inpria’s materials demonstrate excellent resolution for EUV exposure, better dry etching durability than ordinary organic materials, and other unique features, as reported at various industry conferences.