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Top Antireflective Coatings
Features
NFC540 Process Integration
Mechanism of TARC Process
Swing Curve of NFC540 with KrF Resist
Improved Process Latitude with TARC
Features
Excellent defect control
Improved process latitude
Reduced swing ratio by a factor of 3
N=1.41 @ 633nm
440A @ 2500 rpm
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NFC540 Process Integration
NFC540 application step done following resist application and bake
No soft-bake of NFC540 required
NFC540 must be rinsed off with DI water prior to contact with developer solution
Resist Application
Soft-bake
Chill
NFC540 Application
Exposure
PEB
Chill
DI Rinse & Develop
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Mechanism of TARC Process
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Swing Curve of NFC540 with KrF Resist
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Improved Process Latitude with TARC
Structure
JSR KrF Resist
JSR KrF Resist w/NFC540
Max DOF(um)
Max EL
Max DOF(um)
Max EL
A
0.55
21.9%
0.57
17.9%
B
0.45
20.9%
0.54
18.2%
C
0.34
16.8%
0.40
21.3%
D
0.48
16.2%
0.60
13.8%
Common Window
0.39
18.2%
0.46
18.0%
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